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KMID : 1011420100150040361
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Journal of Korean Ophthalmic Optics Society
2010 Volume.15 No. 4 p.361 ~ p.366
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The Fabrication of HCD Ion Plating Apparatus and XPS Analysison the Fine Color Changes of TiN Films on Stainless Steel
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Park Moon-Chan
Lee Jong-Geun
Choi Kwang-Ho
Cha Jung-Won
Kim Eung-Soon
Park Jin-Hong
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Abstract
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Purpose: HCD ion plating apparatus by hollow cathod discharge method was fabricated and TiN films were deposited on stainless steel by this apparatus with increasing in N2 gas flow and the fine color changes of TiN films were analyzed.
Methods: The spectroradiometer and spectrophotometer were used to observe optically the fine color changes of TiN thin films, and XPS was used to analyze the compositions of TiN thin films with increasing in N2 gas flow.
Results: The color coordinate of TiN thin film with N2 120 sccm gas flow showed (0.382, 0.372) which had the mixed colors of gold and silver, and the color coordinate changed to the increasing value of (x,y) with increasing in N2 gas flow which indicated the deep gold color. It was found that the slopes of the reflectances at 550nm were increased with increasing in N2 gas flow. And from the Ti scans using XPS, it was found that the peak heights of 455 eV derived from TiN composition were increased with increasing in N2 gas flow, while the peak heights of 459 eV from TiO2 composition were decreased.
Conclusions: The results obtained above were that the color of TiN film with 120 sccm N2 gas flow had been observed from the mixed color of silver and gold due to TiC, TiO2, TiN on the surface and TiN, TiO2 inside film, and the color of TiN films changed a deep gold color with increasing in N2 gas flow due to increasing TiN composition.
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KEYWORD
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HCD Ion Plating Method, TiN coating, fine color change, XPS
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